Parameter | Specification |
Material | LiTaO3 wafers(White or Black &Fe doped) |
Diameter | 3inch/4inch/6inch |
Diameter Tolerance | ±0.03mm |
Curie Temp | 603±2℃ |
Cutting Angle | X/Y/Z/X112Y/Y36/Y42/Y48/etc |
Tol(±) | <0.20 mm |
Thickness | 0.18 ~ 0.5mm or more |
Primary Flat | 22mm /32mm /42.5mm /57.5mm |
LTV (5mmx5mm) | <1µm |
TTV | <3µm |
BOW | -30 |
WARP | <40µm |
PLTV(<0.5um) | ≥95%(5mm*5mm) |
Orientation Flat | All available |
Surface Type | Single Side Polished(SSP) /Double Sides Polished(DSP) |
Polished side Ra | <0.5nm |
Back Side Criteria | General is 0.2-0.5µm or as customized |
Edge Criteria | R=0.2mm or Bullnose |
Fe doped | Fe doped for saw grade LN< wafers |
Wafer Surface Criteria | Transmissivity general:5.9x10-11 |
Contamination None | |
Particles @>0.3 µm ≤30 | |
Scratch , Chipping None | |
Defect No edge cracks, scratches, saw marks, stains | |
Packing | 25pcs per box |
Optical Grade Lithium Tantalate Wafers
Parameter | Specification |
Material | LiTaO3 wafers(White or Black) |
Diameter | 2inch/3inch/4inch |
Diameter Tolerance | ±0.03mm |
Curie Temp | 603±2℃ |
Cutting Angle | X/Y/Z etc. |
Tol(±) | <0.20 mm |
Thickness | 0.18 ~ 0.5mm or more |
Primary Flat | 16mm/22mm /32mm |
TTV | <3µm |
BOW | -30 |
WARP | <40µm |
Surface Type | Single Side Polished(SSP) /Double Sides Polished(DSP) |
Polished side Ra | <0.5nm |
Back Side Criteria | General is 0.2-0.5µm or as customized |
Edge Criteria | R=0.2mm or Bullnose |
Optical doped | Zn/MgO etc. |
Wafer Surface Criteria | Contamination None |
Particles @>0.3 µm ≤30 | |
Scratch , Chipping None | |
Defect No edge cracks, scratches, saw marks, stains | |
Packing | 25pcs per box |
SAW Grade Lithium Tantalate Wafers
Parameter | Specification |
Material | LiTaO3 wafers |
Diameter | 3inch/4inch/6inch |
Diameter Tolerance | ±0.03mm |
Curie Temp | 603±2℃ |
Cutting Angle | X/Y/Z/X112Y/Y36/Y42/Y48/etc. |
Tol(±) | <0.20 mm |
Thickness | 0.18 ~ 0.5mm or more |
Primary Flat | 22mm /32mm /42.5mm /57.5mm |
LTV (5mmx5mm) | <1µm |
TTV | <3µm |
BOW | -30 |
WARP | <40µm |
PLTV(<0.5um) | ≥95%(5mm*5mm) |
Orientation Flat | All available |
Surface Type | Single Side Polished(SSP) /Double Sides Polished(DSP) |
Polished side Ra | <0.5nm |
Back Side Criteria | General is 0.2-0.5µm or as customized |
Edge Criteria | R=0.2mm or Bullnose |
Wafer Surface Criteria | Transmissivity general:5.9x10-11 |
Contamination None | |
Particles @>0.3 µm ≤30 | |
Scratch , Chipping None | |
Defect No edge cracks, scratches, saw marks, stains | |
Packing | 25pcs per box |